① Hardness-the hardness of the polishing pad determines the ability to maintain the precision of the surface.
② Compression ratio-compression ratio reaction polishing pad of deformation resistance;
③ The quantity of self-restraint-polishing pad is the quality of the polishing Pad storage unit volume.
④ Roughness-surface roughness is the surface of the polishing pad, concave and convex degree;
⑤ Density-density is the degree of densification of the polishing pad material;